JPH0143870Y2 - - Google Patents

Info

Publication number
JPH0143870Y2
JPH0143870Y2 JP1985046517U JP4651785U JPH0143870Y2 JP H0143870 Y2 JPH0143870 Y2 JP H0143870Y2 JP 1985046517 U JP1985046517 U JP 1985046517U JP 4651785 U JP4651785 U JP 4651785U JP H0143870 Y2 JPH0143870 Y2 JP H0143870Y2
Authority
JP
Japan
Prior art keywords
cassette
holder
rotating shaft
substrate
substrate holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985046517U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61164043U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985046517U priority Critical patent/JPH0143870Y2/ja
Publication of JPS61164043U publication Critical patent/JPS61164043U/ja
Application granted granted Critical
Publication of JPH0143870Y2 publication Critical patent/JPH0143870Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Pile Receivers (AREA)
JP1985046517U 1985-03-29 1985-03-29 Expired JPH0143870Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985046517U JPH0143870Y2 (en]) 1985-03-29 1985-03-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985046517U JPH0143870Y2 (en]) 1985-03-29 1985-03-29

Publications (2)

Publication Number Publication Date
JPS61164043U JPS61164043U (en]) 1986-10-11
JPH0143870Y2 true JPH0143870Y2 (en]) 1989-12-19

Family

ID=30560985

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985046517U Expired JPH0143870Y2 (en]) 1985-03-29 1985-03-29

Country Status (1)

Country Link
JP (1) JPH0143870Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59192836U (ja) * 1983-06-10 1984-12-21 日本電気株式会社 ジエツトスクラバ−装置の載置台

Also Published As

Publication number Publication date
JPS61164043U (en]) 1986-10-11

Similar Documents

Publication Publication Date Title
US5503171A (en) Substrates-washing apparatus
JP4467367B2 (ja) 基板反転装置、基板搬送装置、基板処理装置、基板反転方法、基板搬送方法および基板処理方法
JP2574608B2 (ja) ウェハーキャリア
US6511315B2 (en) Substrate processing apparatus
US5960225A (en) Substrate treatment apparatus
TWI673822B (zh) 基板反轉裝置、基板處理裝置以及基板夾持裝置
US20050016565A1 (en) Cleaning masks
KR20210006566A (ko) 기판 처리 장치
US5226437A (en) Washing apparatus
JPS613116A (ja) 洗滌の後の真空蒸着又は陰極スパツタによる被覆等の処理を行なうべき担体の多重保持装置
JPH0143870Y2 (en])
JPS59166675A (ja) エツチング装置
JPH10275846A (ja) 基板保持部材およびこれを利用した基板処理装置
JPH0322547A (ja) 基板ホルダ
JP2977153B2 (ja) ウェハ移し替え装置
US10923384B2 (en) Transfer robot and apparatus for treating substrate with the robot
JPH025597Y2 (en])
JPH0547738A (ja) 基板のウエツト処理方法
JPS6390146A (ja) 基板の移しかえ装置
JP3711010B2 (ja) 基板処理装置および基板処理方法
US7127830B2 (en) Reticle carrier apparatus and method that tilts reticle for drying
JPH0711470Y2 (ja) 半導体基板保持具
JPH10199963A (ja) 搬送具
JPH0754998Y2 (ja) ウエハ支持具
JPH0917762A (ja) 処理装置